Technical Requirement |
Commercial Grade |
Precision Grade |
High Precision |
Size range |
1-600mm |
2-600mm |
2-600mm |
Diameter tolerance |
土0.1mm |
土0.025mm |
土0.01mm |
Thickness tolerance |
土0.1mm |
土0.025mm |
土0.01mm |
Parallelism |
±3´ |
±15´´ |
±2´´ |
Surface quality |
60-40 |
40-20 |
20-10 |
Surface accuracy |
1.0λ |
λ/10 |
λ/20 |
Coating |
10.6μm AR/AR, <2% per Surface |
||
Bevelling |
0.1-0.5mm*45° |
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Substrate |
CVD Znse |
Diameter(mm) |
Thickness(mm) |
Coating |
Diameter(mm) |
Thickness(mm) |
10 |
1 |
AR/AR 7-12μm 10.6μm 2-13μm |
75 |
3 |
12.5 |
1 |
75 |
5 |
|
20 |
2 |
76.2 |
6 |
|
25 |
3 |
80 |
8 |
|
30 |
3 |
90 |
10 |
|
38.1 |
3 |
100 |
10 |
|
40 |
4 |
150 |
15 |
|
50 |
3 |
180 |
18 |
|
50.8 |
3 |
200 |
20 |
|
63.5 |
5 |
300 |
35 |