Turbo Molecular Pump , 4500L/s, F-400/4500 , Oil lubrication
F-400/4500
Turbo Molecular Pump , 4500L/s, F-400/4500 , Oil lubrication
developed the oil lubrication turbo pumps of compact and high-performance with advantages of compact structure, convenient operation, flexible installation, wide application range and stable performance.
Advantages:
This series of pump is with big pumping capacity, 4500L/s and lower vibration, shock resistance, smaller dimension, and faster start /stop and good reliability.
Applications:
Main applications are in industrial leak detection, PVD, CVD, ion implantation, vacuum electronic components manufacturing, low-E glass, ITO glass, optical coating, solar cells, electron beam welding, vacuum furnace and other industries
Specifications:
Specifications:
| Flange（In） | DN400 ISO-K | Gas Throughout （sccm） | N2：5500 |
| Flange（Out） KF | DN100 | He：4000 | |
| Pumping Speed( L/s） | N2：4500 | H2：3200 | |
| He：3200 | Ar：2100 | ||
| H2：2000 | Rotation Speed （ rpm） | 15300 | |
| Ar：4200 | Run-Up Time（min） | ≤10 | |
| Compression Ratio | N2：5*107 | Cooling Type,Standard | Water |
| He：103 | Cooling Water Consumption （ L/min） | ≥1 | |
| H2：5*102 | Cooling Water Temperature（℃） | ≤25 | |
| Ar：5*107 | Power Connection:Voltage （V AC） | DC24/AC220 | |
| Ultimated Pressure（Pa) | <=2*10-6 | Max.Power Consumption （W) | ≤1100 |
| Max. Continuous Fore-vacuum pressure(Pa) | 100 | Controller Model | FD-III |
| Max. Fore-vacuum Pressure | N2：300 | Weight (kgs, net) | 118 |
Dimensions:
